|
Parameter
|
Icon AFM Scanner
|
FastScan AFM Scanner
|
X-Y scan range
X-Y方向扫描范围
|
90µm x 90µm typical, 85µm minimum
90µm × 90µm 典型值，*小85µm
|
35μm x 35μm typical, 30μm minimum
35µm × 35µm 典型值，*小30µm
|
Z range
Z方向扫描范围
|
10µm typical in imaging and force curve modes,
9.5µm minimum
在成像及力曲线模式下典型值为10μm；*小9.5μm
|
≥3μm
|
Vertical noise floor
垂直方向噪音基底
|
<30pm RMS in appropriate environment typical
imaging BW (up to 625Hz)
<30pmRMS, 在合适的环境及典型的成像带宽(达到625Hz)
|
< 40pm RMS, sensor in appropriate
environment (up to 625Hz)
< 40pmRMS, 在合适的环境(达到625Hz)
|
X-Y tip-velocity max.
(1% tracking error)
|
|
>2mm/Sec
|
|
Z tip-velocity max.
|
|
12mm/Sec
|
X-Y position noise
(closed-loop)
X-Y定位噪音(闭环)
|
≤0.15nm RMS typical imaging BW (up to 625Hz)
≤0.15nm RMS，典型成像带宽(达到625Hz)
|
≤0.20nm RMS typical imaging BW
(up to 2.5kHz in Adaptive)
≤0.20nm RMS，典型成像带宽(达到625Hz)
|
X-Y position noise
(open-loop)
X-Y定位噪音(开环)
|
≤0.10nm RMS typical imaging BW (up to 625Hz)
≤0.10nm RMS，典型成像带宽(达到625Hz)
|
|
Z sensor noise level
(closed-loop)
Z传感器噪音水平(闭环)
|
35pm RMS typical imaging BW (up to 625Hz);
50pm RMS, force curve BW (0.1Hz to 5kHz)
35pm RMS，典型成像带宽(达到625Hz);
50pm RMS，力曲线成像带宽(0.1Hz to 5kHz)
|
30pm RMS typical imaging BW (up to 625Hz)
30pm RMS，典型成像带宽(达到625Hz)
|
Integral nonlinearity(X-Y-Z)
整体线性误差(X-Y-Z)
|
<0.5% typical
<0.5% 典型值
|
≤0.5% typical
≤0.5% 典型值
|
Sample size/holder
样品尺寸/夹具
|
210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick
210mm 真空吸盘样品台；夹具，直径 ≤210mm, 厚度 ≤15mm
|
Motorized position stage
(X-Y axis)
电动定位样品台(X-Y轴)
|
180mm × 150mm inspectable area; (180mm × 150mm可视区域;)
2µm repeatability, unidirectional; (单向2um重复性;)
3µm repeatability, bidirectional (双向3um重复性)
|
Microscope optics
显微镜光学系统
|
5-megapixel digital camera;
180µm to 1465µm viewing area;
Digital zoom and motorized focus
五百万像素数字照相机;
180 µm 至 1465 µm 可视范围;
数字缩放及自动对焦功能
|
5-megapixel digital camera;
130µm to 1040µm viewing area;
Digital zoom and motorized focus
五百万像素数字照相机;
130 µm 至 1040 µm 可视范围;
数字缩放及自动对焦功能
|
Controller
控制器
|
NanoScope V / NanoScope v8.15 and later
NanoScope V型控制器
|
Workstation
工作站
|
Integrates all controllers and provides ergonomic design with immediate physical
and visual access
整合所有控制器、结合人体工学设计，提供直接的物理或可视接口
|
Vibration and Acoustic
isolation
振动隔绝 与 声音隔绝
|
Integrated, refer to installation requirements for additional information
|
AFM modes
AFM模式
|
Standard: ScanAsyst, PeakForce Tapping,
TappingMode (air), Contact Mode, Lateral
Force Microscopy, PhaseImaging, Lift Mode, MFM,
Force Spectroscopy, Force Volume, EFM, Surface
Potential, Piezoresponse Microscopy, Force
Spectroscopy;
Optional: PeakForce QNM, HarmoniX,
Nanoindentation, Nanomanipulation, Nanolithograpy,
Force Modulation (air/fluid), TappingMode (fluid),
Torsional Resonance Mode, Dark Lift,
STM, SCM, C-AFM, SSRM, PeakForce TUNA,TUNA,
TR-TUNA, VITA
|
Standard: ScanAsyst, Nanomechanical
Mapping, TappingMode (air), TappingMode
(fluid), PhaseImaging, Contact Mode,
Lateral Force Microscopy, Lift Mode,
MFM, EFM, Force Spectroscopy, Force
Volume
Optional: Nanoindentation,
Nanomanipulation, Nanolithograpy,
Surface Potential, Piezoresponse
Microscopy
|
Certification
|
CE
|
